3 - D optical profilometry at micron scale with modified fiber optic Lloyd's mirror technique

Abstract

In this thesis, it is shown that a modified fiber optic Lloyd’s mirror technique is suitable and practical to produce fringe patterns that have easily adjustable frequency. This allows measuring 3D height distribution of test objects at micron scale without using additional elements as part of the optical projection unit. To test the validity of the proposed method, images that contain deformed fringe patterns due to the height distribution of micron scale test objects are recorded by a CCD camera and analysed with one dimensional continuous wavelet transform. After the extraction of phase map using 1D continuous wavelet transform, the height dis tribution of the test objects is obtained by further analyses. Finally, the results are discussed and compared with the expected values.