Abstract:
In this study, the aim is to produce homogeneous porous silicon(PS) nanostructures and then to observe the effect of resistivity of starting silicon samples. P-type silicon wafers with di erent resistivity are prepared by different anodization methods. Silicon samples fabricated by the electrochemical dissolution are characterized both optically and structurally. By the highlight of quantum con nement effect, optical characterization method is used to determine whether porous silicon nano-structures occur or not. Porous silicon samples are analysed by the Environmental Scanning Electron Microscopy(ESEM).
